Robust Nonlinear Control of a Rapid Thermal Processor
Patel, Nital S
Conference : 13th International Conference on Chemical Vapor Deposition (CVD-XIII) Vol. 96-5, pp. 171-176
Date: May 05 - May 10, 1996
This paper presents application of robust multivariable nonlinear control to the temperature control problem for rapid thermal processing systems. The controller designed achieves good tracking and temperature uniformity for a wide range of processing conditions.