Robust Control of Semiconductor Manufacturing Processes
Baras, John, S.
Date: June 01 - June 01, 1996
This paper considers the control of semiconductor manufacturing processes. We start by considering the run to run control problem. We pose the problem in a risk-sensitive control framework, and derive the recursion for the information state. We then take large deviation type limits, and go on to show that the limiting information state recursion is related to that arising in solving ultimate boundedness control problems. For completeness we present the solution to the deterministic problem. The paper ends with an example involving application of run to run control to end-pointing.Download Full Paper