Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes

Title : Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes
Authors :
Conference : AEC/APC Symposium XII Vol. II, pp. 889-896
Date: September 23 - September 28, 2000

In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoid approximation are compared with other RtR controllers by simulation according to the following principles:

• A good RtR controller should be able to compensate for various disturbances, such as small drifts and  large step disturbances.
• It should be able to deal with constraints, cost requirement, multiple targets, time delays etc.

Preliminary results show the satisfactory performance of the set-valued RtR controller with ellipsoid approximation.

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