A Framework for Robust Run by Run Control with Lot Delayed Measurements
Patel, Nital S
Conference : IEEE Transactions on Semiconductor Manufacturing Vol. 10, No. 1, pp. 75-83
Date: February 01 - February 01, 1997
This paper considers the run by run control problem. We develop a framework to solve such a problem in a robust fashion. The framework also encompasses the case when the system is subject to delayed measurements. Recent results available for the control of such systems are reviewed, and two examples are presented. The first example is based on the end-pointing problem for a depositional process and is subject to noise which has both Gaussian and uniform components. The second one is concerned with rate control in an LPCVD reactor.